CVD

AMAT CENTURA

AMAT P5000

CVD WJ

CVD NOVELLUS

CVD PRODUCER
Key support for CVD
- System refurb, retrofit, and upgrade
- Parts repair and consumable and spare part supply
- Ceramic, Quartz supply, Bellow supply
- AL heater supply and refurb
- ESC New supply and refurb
Cubit tool in stock
- AMAT Centura HDP
- NVLS Speed
- NVLS Altus
- AMAT Centura DxZ
- AMAT CMP (Mirramesa, Mirratrack)
- Ebara CMP : EPO222A
Repair/Refurbishment Capabilities
- All PCB boards for P5000, Centura and Producer
- Power Supply, RF Generators and Controllers
- LFC and MFC
- Injection Valve
- Turbo Pump (leybold, Ebara, seiko seiki)
- Spindle ( NVLS )