1

BASEPLATE,CHAMBER 5200

0040-46460

2

CAP INNJECT MACHINED (NON-COOLED)

3

CAP INNJECT MACHINED (NON-COOLED)

0040-35316

4

CAP EXHAUST W/O COOLING

0040-35388

5

COVER,BASEPLATE INJECT BOTTOM

0040-76684

6

COVER,BASEPLATE EXHAUST BOTTOM

0040-46907

7

BASEPLATE EXHAUST TOP

0040-46908

8

COVER,BASEPLATE INJECT TOP

0040-76683

9

CLAMP RING LOWER ATM/RP

0040-35049

10

MAGNETICALLY COUPLED ROTATION ASS'Y,R3.4(NEW)

0010-12572/0010-21524

11

ASSEMBLE PCB,ROTATION DRIVE

0100-00899

12

MAGNETICALLY COUPLED ROTATION MOTOR

13

HOUSING,GRIPNACTION SUSCEPTOR SUPPORT SHAFT

0020-64327

14

AIR CYLINDER WAFER LIFT,R3 RO

0015-35112

15

CYLINDER,AIR,1-1/8" BORE x 1-1/4" STROKE MAG

3020-01093

16

RING,PARTICAL SHIELD,R3 ROTATION

0020-37321

17

ARM,ROTATION ADJ.TIE DOWN(A,B)

0020-35972

18

DISC ADJUSTMENT RETAINER

0020-35544

19

LAMP MODULE ASSEMBLE(UPPER/LOWER) SET

0010-35223/0010-35224

20

H20 BASE-COOL

0190-35049

21

IRCON PYROMETER 300-1300 C

0090-35052

22

IRCON PYROMETER

47-99C-9(F727)

23

HT SCR POWER CONTROLLER

0190-22509(G-22 120V 2,000W)

24

HALOGEN LAMP(120V, 2000W JCV)

25

HEATER EXCHANGER,AIR WATER

0190-35038

26

BLOWER + MOTOR

0190-35092

27

CYLINDER,AIR, 3.25 BORE,1.5 STROKE, DOUBLE

3020-01052