Generator & Power Supply Repair

S.NO	ITEM	STANDARDS	PHOTOS	TOOL MAKER	PROCESS	DELIVERY	REMARKS
1	LAMEDA POWER SUPPLY	VA-26519		AXCELIS	ETCH	3 Week	200mm
2	GEMINI HV POWER SUPPLY	GEMINI		AXCELIS	ETCH	3 Week	200mm 300mm
3	ACCEL POWER SUPPLY	E11005370A		VARIAN	IMP	3 Week	20mm
4	CIRCULATOR	S-VC-00615 S-39-00615 411-21-1E61 INR-244-264		DNS TEL / SEMES	PHOTO(spinner)	3 Week	200mm 300mm
5	CIRCULATOR CONTROLLER	INR-244-402		DNS TEL / SEMES	PHOTO(spinner)	3 Week	200mm
6	CL7 BOARD	0190-15489REV001		AMAT	CVD	3 Week	200mm
7	COOLANT MODULE	05-08120-01 107484		ASML	PHOTO(stepper)	3 Week	200mm
8	DC POWER SUPPLY	K8-DCBOX-TEL-100		AMT/LAM	ETCH	3 Week	200mm
9	DC POWER SUPPLY	CPW2870L5-01 11482XA			IMP	3 Week	200mm
10	DIGITAL DIRECT CONTORLLER	CX1710CPU		TEL		3 Week	200mm
11	END POINT DETECTOR	NEFL-309S			PHOTO	3 Week	300mm
12	FILAMENT POWER SUPPLY	ESL5-25-1307		AMAT	ETCH	3 Week	200mm 300mm
13	H/V MODULE	0010-14630 REVXXX 0190-16690 REVXXX 0010-39867 REVXXX			ETCH	3 Week	200mm 300mm
14	HOT PACK SENSOR	0010-10663		TEL	ETCH	3 Week	200mm 300mm
15	I/O MOTHER BOARD	810-495585-001			ETCH	3 Week	200mm
16	INTERACTIVE DISPLAY	NT20M-DT121-V2		OMRON	CLN	3 Week	200mm
17	LASER POWER SUPPLY	2113-75SLT		KLA	MI		200mm
18	MCC 2A BOARD			BROOKS	ETCH		200mm
19	MONO CHROMETER			AMT	ETCH		200mm
20	MOTO DRIVER			ULVAC K-DNS TEL	PHOTO CLN EDS		200mm
21	OPTICAL END POINT DETECTOR	685-510250-010		LAM	ETCH	3 Week	200mm
22	OXYGEN ANALYZER	ICT-0A-01 200000092 C7-01-1000-57-		KOKUSAI / TEL	DIFF	3 Week	200mm 300mm
23	PAAC BOARD	4022.471.XXXXX 4022.634.XXXXX		ASML	PHOTO	3 Week	200mm 300mm
24	PADC BOARD	4022.437.XXXXX 4022.471.XXXXX		ASML	PHOTO	3 Week	200mm 300mm
25	PCB ASS'Y ANALOG I/O BOARD	4022.437.XXXXX 4022.471.XXXXX		VARIAN	IMP	3 Week	200mm 300mm
26	POWER SUPPLY	4247-EXXXMSE343B		CANON	PHOTO	3 Week	200mm
27	SAM POWER SUPPLY	P63C-30220BI		VARIAN			200mm
28	SERVO AMPLIFIER	PV1A015SMTXXXX		AMAT			200mm 300mm
29	TCU FLOW METER	FT-20CB9808SA10F3P6		TEL	PHOTO ETCH	3 Week	200mm 300mm
30	THERMO CONTROLLER	INR-244-216A INR-244-217B		TEL / KDNS		3 Week	200mm 300mm
31	TRANSPONDER LEADER	TLG-RS232		Brooks	All	3 Week	300mm
32	TS-4000Z PANEL	TS4000Z		TEL	DIFF	3 Week	200mm
33	TUBE CONTROLLER CX-2000	CX1103 CX-1104 CX1104A		KOKUSAI	DIFF	3 Week	200mm
34	UPS CARD	0190-07905 REV.001		AMAT	Metal	3 Week	200mm
35	WH POWER BOARD	4022.436.1064		ASML	PHOTO	3 Week	200mm
36	NSK MOTOR	0190-14344 RS0810FN544 RZ0810FN507 RS0810FN544		AMT	CMP	6 Week	200mm
37	NSK MOTOR DRIVER	EP0810AFX-05		AMT	CMP	6 Week	200mm

STANDARDS	PHOTOS	TOOL MAKER	PROCESS	DELIVERY	REMARKS
RFG SERIES		AE	CVD, ETCH, IMP	2 week
RF(LF)-10S/R, RF-20S/R, RF-30S/R		AE(RFPP)	CVD, ETCH, METAL	2 week
OEM-1250		ENI	ETCH	2 week
OEM-2000, 25B		ENI	ETCH	2 week
GMW-50, NOVA-50		ENI	CVD, ETCH	2 week
GMW-25		ENI	CVD, ETCH	2 week
OEM-28B		ENI	ETCH	2 week
OEM SERIES		ENI	CVD, ETCH	2 week
RF-5S.LF-5		AE(RFPP)	CVD	2 week
AX-2000/3000		AD-TEC	CVD, ETCH	2 week
CPS-1001		COMDEL	METAL	2 week
CPS-5000		COMDEL	METAL	2 week
AMU SERIES		TRAZAR	CVD, ETCH	2 week
SRN1-2		TRAZAR	CVD	2 week
MFM-20SA		DAIHEN	ETCH	2 week
RMN SERIES		DAIHEN	CVD, ETCH	2 week
MERCURY SERIES		AE	CVD	2 week
ATL-100RA		ASTEC	METAL	2 week
FI20160-1, 2, 3		MKS	ETCH (ASHING)	2 week
FI20162-1, 2, 3		MKS	ETCH (ASHING)	3 week
SXRHC		MKS	ETCH (ASHING)	2 week
AX7670-06, 16, 19, 21, 30, 60 ETC..		MKS	CVD	2~3 week
AX7651, FI20620 ETC…		MKS	CVD	2~3 week
S15ITBC (AX2115)		MKS	ETCH (ASHING)	2~3 week
FI20606, 634, FI20045		MKS	ETCH (ASHING)	1 week

S.NO	ITEM	STANDARDS	PHOTOS	TOOL MAKER	PROCESS	DELIVERY	REMARKS
1	OSCILLOSCOPE (Waveform)	6510
2	Digital Multimeter (Voltage)	MXD-4660A
3	Power Supply	6303D
4	Function Generator (Signal Generator)	MXG-9810A
5	Universal Counter (Frequency)	MXC-2800
6	MR-PIC (Data Copy)	TM-A48
7	ROM-Writer(Data Copy)	TOPMAXII
8	Electronic Load (Load Test)	EL-1000P
9	QT-100/QT-200 (V-I)	QT-100 QT-200
10	LCR Meter (RLC)	100Hz~10 0KHz