Robot Refurb List
| Available Robot List I | ||||
| Robot Model | Process | Tool Maker | Tool Model | Wafer |
| ATR7(Acuatran) | CU ELECTROPLATING | NOVELLUS | SABRE/SABRE-NeXT™ | 300mm |
| Wet-ATR7(Aqutran) | CU ELECTROPLATING | NOVELLUS | SABRE/SABRE-NeXT™ | 300mm |
| ATR8(Reliance) | HDP CVD | NOVELLUS | Concept3 Speed | 300mm |
| MAG 7+ Arm | HDP CVD | NOVELLUS | Concept3 Speed | 300mm |
| ATR7 | PECVD | NOVELLUS | Concept3 Vector | 300mm |
| ATR8(Reliance) | PECVD | NOVELLUS | Concept3 Vector | 300mm |
| ATR8(Reliance) | PECVD | NOVELLUS | Concept3 Altus | 300mm |
| MAG 7 +Arm | PECVD | NOVELLUS | Concept3 Altus | 300mm |
| ATM-407 | CVD | 8"ARC DEP | Producer | 200mm |
| MAG7 | CVD | 8"Novellus C2 Sequel | C2 Sequel Express | 200mm |
| MAG7 | HDP CVD | 8"Novellus C2 Speed | C2 Speed | 200mm |
| MTR5+ Arm | HDP CVD | 8"Novellus C2 Speed | C2 Speed | 200mm |
| MAG7 | CVD | 8"Novellus Altus | Altus | 200mm |
| Brooks Mag7 | HDP CVD | CVD | Novellus Speed | 200mm |
| Mag7+ Arm | DRY ETCH | LAM | Alliance | 200mm |
| ATM-207 | DRY ETCH | LAM | Alliance | 200mm |
| Mag7+ Arm | CVD | JEL | Eureca | 200mm |
| MTR5+ Arm | CVD | JEL | Eureca | 200mm |
| MTR5 | CVD | TES | Tellia | 200mm |
| Mag7 | CVD | TES | Tellia | 200mm |
| VCE 4,6(Vacuum Casset Elevator) | PECVD | NOVELLUS | Concept3 Speed | 200mm |
| Aligner controller | PECVD | NOVELLUS | Concept3 Altus | 200mm |
| R-motor | DRY ETCH | LAM | Alliance | 200mm |
| Available Robot List II | ||||
| Robot Model | Process | Tool Maker | Tool Model | Wafer |
| ATR8 | CMP/Wet | ADE WFR FLATNESS INSPECTION | AFS | 300mm |
| Wetbot-WTM511-2-FWS-02 | CMP/Wet | AMAT CMP | REFLEXION | 300mm |
| ABM-407 | CMP/Wet | FSI ACID SPRAY PROCESS | ZETA | 300mm |
| DBM-2407 | CMP/Wet | FSI ACID SPRAY PROCESS | ZETA | 300mm |
| DBM-2407 | CMP/Wet | FSI CRYOKINETIC CLEAN | ANTARES | 300mm |
| ATM-407 | CMP/Wet | SEZ ACID SPRAY PROCESS | SP304 | 300mm |
| DBM-2406 V2 | CMP/Wet | SEZ SINGLE WAFER CLEAN | DV-38BF | 300mm |
| ABM-405 | Metrology | Accent FTIR | QS3300ME | 300mm |
| ABM-405-1-S-CE-S293 | Metrology | AMAT CD-SEM | Verity | 300mm |
| ABM-405-1-S-CE-S293 | Metrology | AMAT DEFECT REVIEW SEM | SEMVision CX/G2/G2-FIB | 300mm |
| ATR8 | Metrology | FEI CLM FIB SEM | CLM-3D | 300mm |
| ABM-407 | Metrology | KLA DARKFIELD WAFER | AIT XP / PUMA 9000 | 300mm |
| INSPECTION | ||||
| ATR8 | Metrology | KLA E-BEAM INSPECTION | ES20/ES31/ES32 | 300mm |
| ABM-407 | Metrology | KLA MACRO-WAFER INSPECTION | Viper | 300mm |
| ABM-407 | Metrology | KLA OVERLAY REGISTRATION | 5300 Archer 10/Archer | 300mm |
| MEASUREMENT | AIM | |||
| ABM-407 | Metrology | KLA RESISITIVITY MEASUREMENT | RS100 | 300mm |
| ABM-407 | Metrology | KLA THIN FILM MEASUREMENT | ASET-F5x / Spectra-Fx | 300mm |
| ATR8 | Metrology | KLA UNPATTERNED WAFER | SP1 | 300mm |
| INSPECTION | ||||
| ABM-405C-1-S-CE-S293 | Metrology | ThermaWave FILM THICKNESS | OP5340 | 300mm |
| MEASUREMENT | ||||
| ABM-407 | Metrology | Veeco ATOMIC FORCE PROFILING | VX330 | 300mm |
| ATR8 | DRY ETCH | LAM DRY ETCH | 2300 Exelan Flex | 300mm |
| Available Robot List III | ||||
| Robot Model | Process | Tool Maker | Tool Model | Wafer |
| ATR8(Reliance) | DRY ETCH | LAM DRY ETCH | 2300 Versys | 300mm |
| MAG 7 | DRY ETCH | LAM DRY ETCH | 2300 Exelan Flex | 300mm |
| MAG 7 | DRY ETCH | LAM DRY ETCH | 2300 Versys | 300mm |
| ATR8(Reliance) | DRY ETCH | NOVELLUS ASH | Sierra/Gamma | 300mm |
| ABM-407 | ETCH | KLA ELECTRICAL MEASUREMENT | Quantox w/Ultra-EOT | 300mm |
| Option | ||||
| ATM-205 | Thermal/Implant | SDI CV TEST | Faast 330 | 300mm |
| ABM-405C-1-S-CE-S293 | Thermal/Implant | ThermaWave IMPLANT MONITOR | TP630 | 300mm |
| ATR8 | Thermal/Implant | Varian MEDIUM-CURRENT | VIISTa 810 | 300mm |
| Dual Arm Robot-DBM-2706 | Thermal/Implant | Varian MEDIUM-CURRENT | VIISTa 810 | 300mm |
| ATR8 | Thermal/Implant | Varian VIISTA HCP HI CURRENT | VIISTa 80HP / VIISTa HCP | 300mm |
| Dual Arm Robot-DBM-2706 | Thermal/Implant | Varian VIISTA HCP HI CURRENT | VIISTa 80HP / VIISTa HCP | 300mm |
| ATR8 | Thermal/Implant | Hypernex GRAIN BOUNDARY | AutoTex30 | 300mm |
| MEASUREMENT | ||||
| ATR8 | Thinfilm | Jordan Valley XRR/XRF THINFILM | 5200T | 300mm |
| MEASUREMENT | ||||
| ATM 407B + track | Thinfilm | Measure | KLA 5300 | 200mm |
| ATM 407B | Photo | Measure | KLA 5300 | 200mm |
| ATM 407B + track | Photo | Measure | KLA AIT | 200mm |
| ATM 407B + track | Photo | Measure | KLA AIT | 200mm |
| ATM 407B | Photo | Measure | AMAT SEM vision | 200mm |
| ATM 407B | Photo | Measure | KLA 1800 | 200mm |
| Orbitran | Plasma | Ash | Gasonic L3500 | 200mm |
| ABM-107 | Thinfilm | RUDOLPH OPAQUE FILM | Metapulse | 300mm |
| THICKNESS MEASUREMENT | ||||
| ABM-405C-1-S-CE-S293 | Diffusion | ThermaWave Optiprobe | OP5340 | 200mm |
| ATM 100 | Diffusion | ThermaWave Optiprobe | OP2600 | 200mm |
| RR700 | CMP | AMAT | Mirra | 200mm |
| RR701 | Novellus | 300mm | ||
| RR717 | Ebara | 300mm | ||
| RR713 | Ulvac | 300mm | ||
| RA301 | Nikon | 300mm | ||
| RA210 | Cannon | 300mm | ||